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Flexible a-IGZO TFT Technology: Recent Developments & Applications

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In this talk I will introduce the TFT activities at Holst Centre and highlight some developing flexible (a-IGZO) TFT applications. Next, I will dive into recent developments regarding flexible a-IGZO TFT technology scaling as well as manufacturing cost optimization both from a S2S as well as R2R processing point of view. Specifically, progress on technology building blocks is shown regarding (i) compatible TFT architecture, (ii) (multilevel) nanoimprint lithography and (iii) s-ALD deposited TFT materials.

This talk is part of the Optoelectronics Group series.

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