Abstract

This talk will introduce a top-down method to make mass production of micro/nano dual-scale structures. Well-designed microstructures are fabricated by normal micro fabrication process, while nanostructures are formed by following improved etching and growing process to realize micro-nano dual structures. By combining the uniformed microstructures and nanostructures on the same surface, these MNDS structures have the unique properties, such as anti-reflectivity, super-hydrophobicity and super-high-density. The relationship of MNDS and its properties will be studied and analyzed by a novel method, 3D SEM reconstruction software, which is developed by the author’s group, which can read cross-scale SEM photo into digital data and form the solid model for simulation automatically. Finally, some examples of using these MNDS in energy harvesting, especially in triboelectric nanogenerator (TENG) will be demonstrated as a renewable, clean and usable power source for smart system.