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SUMMARY:"Meeting the challenge of Extreme Ultra Violet Lithography\; the d
 esign and operation of a highly sensitive and selective hydrocarbon sensor
 " (Amy Stevens) AND "Making a big splash with Fibre Optic LEED" (Choe Stoc
 kford) - Amy Stevens\, Chloe Stockford
DTSTART:20090602T151500Z
DTEND:20090602T161500Z
UID:TALK17638@talks.cam.ac.uk
CONTACT:Tina Jost
DESCRIPTION:Contamination of critical components within expensive high-vac
 uum process technologies poses a serious obstacle to their implementation.
  Of particular interest in this talk is the Next-Generation semiconductor 
 fabrication technique of Extreme Ultra-Violet Lithography (EUVL). Highly e
 xpensive multilayer mirrors\, used to reflect radiation\, are critically d
 amaged by extremely low partial pressures of certain hydrocarbons and ther
 efore there is an urgent need for selective\, sensitive\, robust\, high-va
 cuum compatible sensors to be placed at key locations. We have taken two d
 ifferent approaches to develop hydrocarbon sensors\, based on the solid st
 ate electrolyte YSZ. I will introduce each design and demonstrate operatio
 n under real working conditions. \n(Amy Stevens)\n\nLow Energy Electron Di
 ffraction (LEED) is one of the principal experimental techniques for the a
 ccurate determination of structure of periodically ordered surfaces. Howev
 er\, conventional LEED optics operate with a beam current in the order of 
 µAmps and this can result in electron beam damage to the surface . Conseq
 uently\, it has not hithero been possible to make a structural determinati
 on by LEED of molecular adsorbate surface systems. Our Fibre Optic LEED in
 strument has been designed to operate at nAmp beam currents\, allowing us 
 to push the boundaries of which adsorbate-surface systems we can investiga
 te. I will present a study of water on Cu{110}\, a system for which there 
 is a lack of experimental work due to its sensitivity to electron beam dam
 age. This study not only demonstrates the Fibre Optic LEED's ability to ex
 amine an electron beam sensitive system but also seeks to address a key qu
 estion: does the water bilayer exist as intact or partially dissociated on
  copper surfaces?\n(Chloe Stockford)\n
LOCATION:Pfizer Lecture Theatre\, Department of Chemistry
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