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SUMMARY:FIB/SEM 3D applications: a progress report - Dr Martin Ritter\, De
 pt of Materials Science & Metallurgy\, University of Cambridge
DTSTART:20091103T150000Z
DTEND:20091103T160000Z
UID:TALK20522@talks.cam.ac.uk
CONTACT:Dr Jonathan Barnard
DESCRIPTION:State-of-the-art focused ion beam (FIB) instruments have an io
 n column for sample modification and an electron column for scanning elect
 ron microscopy (SEM). A 3D reconstruction of a sample volume can be achiev
 ed by generating serial sections using the FIB with subsequent high-resolu
 tion SEM imaging of each newly created section ("slice & view"). However\,
  the process of serial sectioning with FIB is used not only for volumetric
  reconstruction of the microstructure\, but is also the basis for quantita
 tive 3D analytical methods\, such as 3D electron backscatter diffraction (
 3D EBSD) and 3D energy dispersive X-ray spectroscopy (3D EDS).\nThe the ab
 ility and accuracy of serial FIB sectioning was tested to enable efficient
  3D reconstructions using SEM image data\, and\, preliminary data from bot
 h 3D analytical methods are shown and\ndiscussed.\n
LOCATION:T001 [Tower Seminar Room]\, Materials Science and Metallurgy\, De
 partment of
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