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SUMMARY:Applications of Diamond and Diamond-Like Carbon in MEMS - Dr. Jack
  Luo\, CAPE\, Department of Engineering
DTSTART:20061018T130000Z
DTEND:20061018T140000Z
UID:TALK5740@talks.cam.ac.uk
CONTACT:Dr. Richard\, Yong Qing Fu
DESCRIPTION:Abstract: Diamond and Diamond Like Carbon (DLC) thin films pos
 sess a number of desirable and attractive material properties. These inclu
 de high values of Young's modulus\, hardness and tensile strength combined
  with low coefficients of friction and good wear resistance. As a conseque
 nce\, they are finding increasing applications in micro-electro-mechanical
  systems (MEMS).  This seminar will review these distinct material propert
 ies from an engineering design point of view and highlight the application
 s of diamond and DLC in various MEMS devices.  Thin diamond and DLC layers
  have been used as coatings to improve the wear and friction of micro-comp
 onents and to reduce adhesion between microstructures and their substrates
 .  The high values of the elastic modulus of diamond and DLC have been exp
 loited in the design of high frequency resonators and comb-drivers for com
 munication and sensing applications. This talk also presents details of no
 vel microcages that take advantage of large intrinsic stresses induced dur
 ing deposition to form a normally closed micro-cage.  These devices\, whic
 h have a diameter of 30~40 (m\, are suitable for capturing biological cell
 s by confinement without the direct application of a large force\, thus mi
 nimising the chance of inadvertent mechanical damage.
LOCATION:Venue to be confirmed
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