Abstract

Abstract: Diamond and Diamond Like Carbon (DLC) thin films possess a number of desirable and attractive material properties. These include high values of Young’s modulus, hardness and tensile strength combined with low coefficients of friction and good wear resistance. As a consequence, they are finding increasing applications in micro-electro-mechanical systems (MEMS). This seminar will review these distinct material properties from an engineering design point of view and highlight the applications of diamond and DLC in various MEMS devices. Thin diamond and DLC layers have been used as coatings to improve the wear and friction of micro-components and to reduce adhesion between microstructures and their substrates. The high values of the elastic modulus of diamond and DLC have been exploited in the design of high frequency resonators and comb-drivers for communication and sensing applications. This talk also presents details of novel microcages that take advantage of large intrinsic stresses induced during deposition to form a normally closed micro-cage. These devices, which have a diameter of 30~40 (m, are suitable for capturing biological cells by confinement without the direct application of a large force, thus minimising the chance of inadvertent mechanical damage.